Measurement ( IF 3.364 ) Pub Date : 2021-02-22 , DOI: 10.1016/j.measurement.2021.109183 Yibo Zou; Markus Kaestner; Eduard Reithmeier; Tuo Shi; Xiaofeng Li
In this paper, a topographic data stitching method is firstly introduced for compensating and optimizing the tilt errors derived from the lateral guide of the stage of a confocal laser scanning microscope. Afterwards, a novel evaluation process, including both simulated verification and experimental verification, is proposed to analyze the stitching precision and its applicability. At last, the evaluation is conducted with multiscale measured datasets, using five typical engineering surfaces with different surface textures. The results show that the developed method can compensate for the tilt uncertainty without the help of the precision apparatus and exhibits improved performance in comparison with conventional methods. In addition, the results of the comprehensive verification show the stitching precision is mainly influenced by concrete surface textures, surface roughness, acquired data resolution as well as the magnitude of tilt uncertainties.