This article proposed a novel design for the monolithic micro-LED array, directly integrated with a sapphire microreflector. Its resolution was 300 dpi. Theoretically, each micro-LED pixel owns an individual sapphire microreflector which can directly concentrate rays from an emitting source. Therefore, this study proposed that the optical crosstalk between neighboring micro-LED pixels could be suppressed and the contrast of the micro-LED array improved; as this would be especially beneficial for display. The simulation results showed that the increased thickness of the sapphire microreflector could further improve the optical performance of the micro-LED array. For the fabrication process, the key technology was an integrated process involving the inductively coupled plasma (ICP) etching technology for sapphire and micro-LED fabrication, which was used to fulfill the proposed and reference micro-LED arrays. The measurement results showed that the sapphire microreflector could effectively concentrate the emitting rays and increase the contrast of the micro-LED array. In addition, it also indicated that the inclination angle of the microreflector could further improve optical performance. Therefore, this approach was verified to be capable of improving the performance of the micro-LED display.

中文翻译：

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整体式Mi​​cro-LED阵列蓝宝石微反射镜的实现

本文提出了一种直接与蓝宝石微反射器集成的单片微型LED阵列的新颖设计。其分辨率为300 dpi。从理论上讲，每个micro-LED像素都拥有一个单独的蓝宝石微反射镜，它可以直接聚集来自发射源的光线。因此，本研究提出可以抑制相邻的微型LED像素之间的光学串扰，并改善微型LED阵列的对比度。因为这对展示特别有利。仿真结果表明，增加蓝宝石微反射器的厚度可以进一步提高micro-LED阵列的光学性能。对于制造工艺，关键技术是集成工艺，涉及用于蓝宝石和microLED制造的感应耦合等离子体（ICP）蚀刻技术，用于实现建议的和参考的微型LED阵列。测量结果表明，蓝宝石微反射器可以有效地聚集发射光线，并提高微LED阵列的对比度。另外，还表明微反射器的倾斜角可以进一步改善光学性能。因此，该方法被证实能够改善微型LED显示器的性能。