TEA CO₂ laser pulses were used to create micro-channels on PES samples with various low fluences and scanning speeds in 16–50 J/cm² and 23–45 µm/s ranges, respectively. Different micro-channels were created with 142–342 µm widths and 85–440 µm depths which has been 3-dimensionally simulated using ABAQUS software based on the finite element method and CIN heat source. The sharp spike (~85 ns FWHM) and long tail (~3.8 µs) parts of the laser pulses were mathematically modeled with individual Gaussian profiles. A good agreement has been found between the simulated and experimental results. Namely, the maximum relative errors of the depth and opening width of the grooves remain below 11.5% and 12.3%, respectively. However, the corresponding mean values of these relative errors do not exceed 4.1% and 7.5%, respectively.

使用TEA CO ₂激光脉冲在PES样品上创建微通道，并具有不同的低通量和16-50 J / cm ^2的扫描速度和23–45 µm / s范围。创建了不同的微通道，其宽度为142–342 µm，深度为85–440 µm，已使用基于有限元方法和CIN热源的ABAQUS软件对其进行了三维模拟。激光脉冲的尖峰脉冲（〜85 ns FWHM）和长尾巴（〜3.8 µs）部分通过单独的高斯分布进行数学建模。在模拟结果和实验结果之间找到了很好的一致性。即，凹槽的深度和开口宽度的最大相对误差分别保持在11.5％和12.3％以下。但是，这些相对误差的相应平均值分别不超过4.1％和7.5％。