Control of local electron and ion density using passive resonant coils is experimentally investigated in an inductive argon discharge. Four passive resonant coils are installed under a powered coil; each coil has a fan shape and good azimuthal symmetry. Electron energy probability functions and two-dimensional ion density profiles were measured under both resonant and non-resonant regimes. At non-resonance, almost all of the current flows through the powered coil located in the center of the reactor, and the profiles of the electron and ion density are convex. However, at resonance, a large current flows through the passive resonant coil, and dramatic changes are observed in the electron and ion density profiles. At resonance, the electron and ion densities near the passive resonant coil are increased by 300% compared to the non-resonant condition, and radial distributions become almost flat. Experimental results show that the electron and ion density profiles can be effectively controlled by a passive resonant coil at both low pressure (5mTorr) and high pressure (50mTorr). These changes in electron and ion density profiles can be understood by the changes of the electron heating and ionization regions.

实验性研究了在感应氩气放电中使用无源谐振线圈控制局部电子和离子密度。有源线圈下方安装了四个无源谐振线圈。每个线圈具有扇形形状和良好的方位对称性。在共振和非共振条件下都测量了电子能量概率函数和二维离子密度分布。在非谐振状态下，几乎所有电流都流经位于反应堆中心的通电线圈，并且电子和离子密度的轮廓是凸形的。但是，在谐振时，大电流流过无源谐振线圈，并且在电子和离子密度分布图中观察到了巨大的变化。在共振时，与非共振条件相比，无源共振线圈附近的电子和离子密度增加了300％，径向分布几乎变得平坦。实验结果表明，在低压（5mTorr）和高压（50mTorr）下，无源谐振线圈均可有效控制电子和离子密度分布。电子和离子密度分布图的这些变化可以通过电子加热和电离区域的变化来理解。