The main factors affecting the displacement of micro-motion platform during the grinding process are spindle speed, cutting force, and piezoelectric ceramic input voltage model. This article, using the orthogonal test method, found a set of machining parameters which lead to less displacement deviation between practical test and theoretic analysis. First of all, single-factor experiments were carried out to study how spindle speed, cutting force, and piezoelectric ceramic input voltage model affect the experimental results, and then the orthogonal test was conducted. The experimental datum shows that voltage model was the most influential factor, followed by spindle speed and cutting force. The optimum combination of grinding parameters was obtained as spindle speed of 800 r/min, cutting force of 18 N, and voltage model radius of 12 µm. At this time, the average unit error of displacement of micro-motion platform was 9.13%.

在磨削过程中影响微动平台位移的主要因素是主轴转速，切削力和压电陶瓷输入电压模型。本文使用正交试验方法，找到了一组加工参数，从而减少了实际试验和理论分析之间的位移偏差。首先，通过单因素实验研究主轴转速，切削力和压电陶瓷输入电压模型如何影响实验结果，然后进行正交试验。实验数据表明，电压模型是影响最大的因素，其次是主轴转速和切削力。获得了最佳的磨削参数组合，主轴转速为800 r / min，切削力为18 N，电压模型半径为12 µm。