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Hertz-linewidth semiconductor lasers using CMOS-ready ultra-high-Q microresonators
Nature Photonics ( IF 35.0 ) Pub Date : 2021-02-11 , DOI: 10.1038/s41566-021-00761-7
Warren Jin , Qi-Fan Yang , Lin Chang , Boqiang Shen , Heming Wang , Mark A. Leal , Lue Wu , Maodong Gao , Avi Feshali , Mario Paniccia , Kerry J. Vahala , John E. Bowers

Driven by narrow-linewidth bench-top lasers, coherent optical systems spanning optical communications, metrology and sensing provide unrivalled performance. To transfer these capabilities from the laboratory to the real world, a key missing ingredient is a mass-produced integrated laser with superior coherence. Here, we bridge conventional semiconductor lasers and coherent optical systems using CMOS-foundry-fabricated microresonators with a high Q factor of over 260 million and finesse over 42,000. A five-orders-of-magnitude noise reduction in the pump laser is demonstrated, enabling a frequency noise of 0.2 Hz2 Hz−1 to be achieved in an electrically pumped integrated laser, with a corresponding short-term linewidth of 1.2 Hz. Moreover, the same configuration is shown to relieve the dispersion requirements for microcomb generation that have handicapped certain nonlinear platforms. The simultaneous realization of this high Q factor, highly coherent lasers and frequency combs using foundry-based technologies paves the way for volume manufacturing of a wide range of coherent optical systems.



中文翻译:

使用 CMOS 就绪的超高 Q 微谐振器的赫兹线宽半导体激光器

在窄线宽台式激光器的驱动下,跨越光通信、计量和传感的相干光学系统提供了无与伦比的性能。为了将这些能力从实验室转移到现实世界,一个关键的缺失成分是具有卓越相干性的大规模生产的集成激光器。在这里,我们使用 CMOS 代工厂制造的微谐振器桥接传统的半导体激光器和相干光学系统,该微谐振器具有超过 2.6 亿的高Q因子和超过 42,000 的精细度。展示了泵浦激光器中五个数量级的噪声降低,实现了 0.2 Hz 2  Hz -1的频率噪声在电泵浦集成激光器中实现,相应的短期线宽为 1.2 Hz。此外,相同的配置被证明可以减轻对某些非线性平台不利的微梳生成的色散要求。使用基于代工的技术同时实现这种高Q因子、高相干激光器和频率梳,为大量生产各种相干光学系统铺平了道路。

更新日期:2021-02-11
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