We proposed a new primary calibration method of a laser Doppler vibrometer (LDV) using the optical modulated excitation of an electro-optical modulator and validated this approach by comparing mechanical modulated excitation with homodyne laser interferometer at the National Metrology Institute of Japan (NMIJ). The velocity sensitivity of the LDV was evaluated with the uncertainty budget at a high-frequency range up to 1 MHz, which is indicated as the upper limit of 50 kHz in ISO (International Organization for Standardization) 16063–41. As the results, we confirmed that velocity sensitivities between optical and mechanical modulated excitations are flat within their uncertainty from 100 Hz up to 1 MHz. Moreover, in order to evaluate the accurate phase shift of the accelerometer up to 20 kHz using optical modulated excitation, we also revealed the reliability of two time shifts between homodyne and heterodyne laser interferometers.

我们提出了一种使用电光调制器的光调制激励的激光多普勒振动计（LDV）的新的主要校准方法，并通过将机械调制激励与日本国家计量学会（NMIJ）的零差激光干涉仪进行了比较来验证了该方法。在不超过1 MHz的高频范围内，用不确定性预算评估了LDV的速度灵敏度，在ISO（国际标准化组织）16063–41中将其表示为50 kHz的上限。结果，我们确认了光学和机械调制激励之间的速度灵敏度在100 Hz至1 MHz的不确定性范围内是平坦的。此外，为了使用光调制激励来评估加速度计在20 kHz以下的准确相移，