In this paper, we report a new type of MoS₂-based grating sensor for in-plane biaxial strain gauges with a precision limit of ~ 1‰. The MoS₂ grating is numerically simulated with different biaxial strains up to 5%. Our first-principles calculations reveal that the strain sensitivity of the MoS₂ reflectance spectrum can be considered an additional strain sensor integrated with the grating structure, enabling the mapping of in-plane biaxial strains. Our experimental studies on a prototype MoS₂-grating sensor further confirm that a strain component perpendicular to the grating period can cause intensity peak shifts in the grating’s first-order diffraction patterns. This work opens a new path towards the sensing of in-plane biaxial strain within a single-grating device. Our new approach is applicable for other materials that have predictable reflectance response under biaxial strains and the capacity to form a two-dimensional single-crystal layer.

在本文中，我们报告了一种用于面内双轴应变仪的新型基于MoS ₂的光栅传感器，其精度极限为〜1‰。MoS ₂光栅是在高达5％的不同双轴应变下进行数值模拟的。我们的第一性原理计算表明，可以将MoS ₂反射光谱的应变敏感性视为与光栅结构集成在一起的附加应变传感器，从而能够绘制平面内双轴应变。我们对MoS ₂原型的实验研究光栅传感器进一步证实，垂直于光栅周期的应变分量会导致光栅的一阶衍射图样中的强度峰移动。这项工作为单光栅器件内的平面内双轴应变的检测开辟了一条新途径。我们的新方法适用于在双轴应变下具有可预测的反射响应并具有形成二维单晶层的能力的其他材料。