The charge stability of electret materials can directly affect the performance of electret-based devices such as electrostatic energy harvesters. In this paper, a spray-coating method is developed to deposit an electret layer with enhanced charge stability. The long-term stability of a spray-coated electret is investigated for 500 days and shows more stable performance than a spin-coated layer. A second-order linear model that includes both the surface charge and space charge is proposed to analyze the charge decay process of electrets in harsh environments at a high temperature (120 °C) and high humidity (99% RH); this model provides better accuracy than the traditional deep-trap model. To further verify the stability of the spray-coated electret, an electrostatic energy harvester is designed and fabricated with MEMS (micro-electromechanical systems) technology. The electret material can work as both the bonding interface and electret layer during fabrication. A maximum output power of 11.72 μW is harvested from a vibrating source at an acceleration of 28.5 m/s². When the energy harvester with the spray-coated electret is exposed to a harsh environment (100 °C and 98% RH), an adequate amount of power can still be harvested even after 34 h and 48 h, respectively.

驻极体材料的电荷稳定性可以直接影响基于驻极体的设备（例如静电能量采集器）的性能。本文开发了一种喷涂方法来沉积具有增强电荷稳定性的驻极体层。喷涂驻极体的长期稳定性经过 500 天的研究，显示出比旋涂层更稳定的性能。提出了同时包含表面电荷和空间电荷的二阶线性模型，用于分析驻极体在高温（120℃）和高湿（99%RH）恶劣环境下的电荷衰减过程；该模型比传统的深陷阱模型提供了更好的精度。为了进一步验证喷涂驻极体的稳定性，采用MEMS（微机电系统）技术设计并制造了静电能量收集器。驻极体材料在制造过程中既可以作为接合界面又可以作为驻极体层。从加速度为 28.5 m/s ²的振动源获得的最大输出功率为 11.72 μW 。当具有喷涂驻极体的能量收集器暴露在恶劣环境（100°C和98%RH）下时，即使在34小时和48小时后仍然可以收集足够的电力。