An image distortion elimination method based on optimized windowed Fourier transform processing is proposed in this paper. Simulation testing was performed beforehand to find the optimal window size and grating pitch (in pixels), which are crucial for the distortion calibration accuracy. With the optimized parameters, gratings with different frequencies were fabricated by photolithography as standard plates to calibrate the aberration of the optical microscope. The influence induced by the misalignment of the grating lines and the viewing field axis on the distortion calibration was addressed and eliminated by the proposed method in this paper. With the proposed method, the image distortion of the optical microscope under various magnifications was calibrated successfully.

提出了一种基于优化加窗傅里叶变换处理的图像失真消除方法。事先进行了仿真测试，以找到最佳的窗口尺寸和光栅间距（以像素为单位），这对于失真校准的准确性至关重要。利用优化的参数，通过光刻制造具有不同频率的光栅作为标准板，以校准光学显微镜的像差。本文提出的方法解决并消除了由光栅线和视场轴的不对准引起的对畸变校准的影响。利用所提出的方法，成功地校正了光学显微镜在各种放大倍数下的图像畸变。