This paper reports a silicon-chip based electromagnetic (EM) vibration energy harvester that is fabricated with a wafer-level micro-casting technique to form on-chip integrated 3D metal solenoids and magnet sliding channels. Many solenoids of 150-turn coil are simultaneously formed by filling molten ZnAl _x alloy into the pre-micromachined solenoid moulds in one wafer within 7 min. After saw dicing to obtain the solenoid chips, a sliding permanent magnet for responding to environmental vibration is inserted into the pre-etched silicon channel inside the solenoid. Excited by external vibration, the magnet can slide in the channel to generate electricity. The size of the micro electro mechanical systems (MEMS) harvester chip is only 10.5 2.5 1.7 mm³. The experimental results show that the energy harvester can efficiently collect vibration energy in the environment. Under excited acceleration-amplitude of 49 m s⁻² (i.e. 5 g) at the frequency of 24 Hz, the normalized power density (NPD) generated from the harvester reaches 12.38 μW cm⁻³ g⁻². By comparing with reported non-MEMS wire-wound EM harvesters and on-chip piezoelectric/electrostatic ones, this silicon-chip based EM harvester exhibits much superior NPD.

本文报道了一种基于硅芯片的电磁（EM）振动能量收集器，该收集器采用晶圆级微铸技术制造，以形成片上集成的3D金属螺线管和磁体滑动通道。通过在7分钟内将熔融的ZnAl _x合金填充到一个晶片中的预微加工螺线管模具中，可以同时形成许多150匝线圈的螺线管。在锯切成薄片以获得螺线管芯片之后，将用于响应环境振动的滑动永磁体插入螺线管内部的预蚀刻硅通道中。受到外部振动的激励，磁铁可以在通道中滑动以发电。微机电系统（MEMS）收割机芯片的尺寸仅为10.5 2.5 1.7 mm ³ 。实验结果表明，能量收集器可以有效地收集环境中的振动能量。下的49毫秒兴奋加速度振幅^-2（IE 5克以24Hz的频率），从采集所产生的归一化功率密度（NPD）达到12.38 μ w ^厘米^-3克^-2。通过与已报道的非MEMS线绕式EM收割机和片上压电/静电收割机进行比较，该基于硅芯片的EM收割机表现出非常出色的NPD。