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Analysis of carrier species in arsenic-implanted p- and n-type Hg0.7Cd0.3Te
Infrared Physics & Technology ( IF 3.3 ) Pub Date : 2021-02-01 , DOI: 10.1016/j.infrared.2021.103665
I.I. Izhnin , K.D. Mynbaev , A.V. Voitsekhovskii , A.G. Korotaev , V.S. Varavin , S.A. Dvoretsky , N.N. Mikhailov , M.V. Yakushev , O.I. Fitsych , Z. Swiatek , R. Jakiela

Carrier species in arsenic-implanted p– and n–type Hg0.7Cd0.3Te films grown by molecular-beam epitaxy were investigated with the use of the Hall-effect studies and mobility spectrum analysis. The implantation was performed with ion energy 190 or 350 keV and ion fluence ranging from 1012 to 1015 cm−2. A substantial difference between carrier species in Hg0.7Cd0.3Te and Hg0.8Cd0.2Te films subjected to arsenic implantation and post-implantation activation annealing was established. In particular, arsenic implantation in p–type Hg0.7Cd0.3Te in most cases lead to the formation of n+–p– (not n+–n–p–) structures, and in n–type Hg0.7Cd0.3Te films post-implantation activation annealing lead to modification of the electrical parameters of the n–type ‘base’, in contrast to Hg0.8Cd0.2Te material studied earlier. The difference in carrier species formed in arsenic-implanted Hg0.7Cd0.3Te and Hg0.8Cd0.2Te films was tentatively explained by different background impurity concentrations in the films with different chemical composition.



中文翻译:

砷注入的p型和n型Hg 0.7 Cd 0.3 Te中的载流子种类分析

利用霍尔效应研究和迁移谱分析,研究了通过分子束外延生长的砷注入的p型n型Hg 0.7 Cd 0.3 Te薄膜中的载流子种类。以190或350keV的离子能量和10 12至10 15 cm -2的离子通量进行注入。建立了在Hg 0.7 Cd 0.3 Te和Hg 0.8 Cd 0.2 Te膜中进行了砷注入和注入后活化退火的载体种类之间的显着差异。特别是p型汞中的砷植入0.7 Cd 0.3 Te在大多数情况下会导致形成n + –p–(不是n + –n–p–)结构而在n–型Hg 0.7 Cd 0.3 Te膜中,植入后的活化退火会导致n + -p-的改性。与先前研究的Hg 0.8 Cd 0.2 Te材料相比,n–型“碱”的电参数。砷注入的Hg 0.7 Cd 0.3 Te和Hg 0.8 Cd 0.2中形成的载体种类的差异尝试用具有不同化学组成的薄膜中不同的背景杂质浓度来解释Te薄膜。

更新日期:2021-02-15
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