Phase sensitivity determines the lowest optical path length value that can be detected from the noise floor in quantitative phase microscopy (QPM). The temporal phase sensitivity is known to be limited by both photon shot noise and a variety of noise sources from electronic devices and environment. To beat the temporal phase sensitivity limit, we explore various ways to reduce different noise factors in off-axis interferometry-based QPM with laser illumination. Using a high electron-well-capacity camera, we measured the temporal phase sensitivity values using non-common-path and common-path interferometry-based QPM systems under different environmental conditions. A frame summing method and a spatiotemporal filtering method are further used to reduce the noise contributions, thus enabling us to push the overall temporal phase sensitivity to less than 2 pm.

中文翻译：

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在离轴干涉测量中基于定量相位显微镜的拍打时间相位灵敏度极限

相位灵敏度确定可以在定量相位显微镜（QPM）中从本底噪声中检测到的最低光程长度值。已知时间相位灵敏度受光子散粒噪声以及来自电子设备和环境的各种噪声源的限制。为了克服时间相位灵敏度极限，我们探索了各种方法来减少基于轴外干涉的基于QPM的激光照明中的不同噪声因子。使用高电子阱容量相机，我们在不同的环境条件下使用基于非共径和基于共径干涉法的QPM系统测量了时间相位灵敏度值。还使用帧求和方法和时空滤波方法来减少噪声贡献，