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A Mechatronic Lock-In Amplifier: Integrating Demodulation in Sensor Electronics for Measuring Mechanical Oscillations
IEEE Transactions on Instrumentation and Measurement ( IF 5.6 ) Pub Date : 2021-01-01 , DOI: 10.1109/tim.2020.3047208 Mathias Poik , Dominik Kohl , Mario Mayr , Christoph Kerschner , Georg Schitter
IEEE Transactions on Instrumentation and Measurement ( IF 5.6 ) Pub Date : 2021-01-01 , DOI: 10.1109/tim.2020.3047208 Mathias Poik , Dominik Kohl , Mario Mayr , Christoph Kerschner , Georg Schitter
The demodulation of mechanical oscillations is essential for the operation of micro- and nanometer-scale transducer systems, such as resonant MEMS mirrors and cantilever-based sensors. The use of external demodulators, such as lock-in amplifiers and spectrum analyzers is not always desired due to their large size, complexity, and cost. The method presented in this article enables simplified demodulation of the oscillation of mechanical oscillators with integrated deflection sensors. By configuring two deflection sensors in separate bridge circuits, which are supplied with in-phase and quadrature sinusoidal signals, the amplitude, and phase of the mechanical oscillation can directly be measured without additional demodulation. The method is implemented and experimentally verified by demodulating the oscillation of a self-sensing Atomic Force Microscopy cantilever with integrated piezoresistive elements.
中文翻译:
机电锁定放大器:在传感器电子器件中集成解调以测量机械振荡
机械振荡的解调对于微米级和纳米级换能器系统的运行至关重要,例如谐振 MEMS 反射镜和基于悬臂的传感器。由于外部解调器尺寸大、复杂性和成本高,因此并不总是需要使用外部解调器,例如锁定放大器和频谱分析仪。本文中介绍的方法可以简化对带有集成偏转传感器的机械振荡器的振荡的解调。通过在单独的桥式电路中配置两个偏转传感器,它们提供同相和正交正弦信号,可以直接测量机械振荡的幅度和相位,而无需额外的解调。
更新日期:2021-01-01
中文翻译:
机电锁定放大器:在传感器电子器件中集成解调以测量机械振荡
机械振荡的解调对于微米级和纳米级换能器系统的运行至关重要,例如谐振 MEMS 反射镜和基于悬臂的传感器。由于外部解调器尺寸大、复杂性和成本高,因此并不总是需要使用外部解调器,例如锁定放大器和频谱分析仪。本文中介绍的方法可以简化对带有集成偏转传感器的机械振荡器的振荡的解调。通过在单独的桥式电路中配置两个偏转传感器,它们提供同相和正交正弦信号,可以直接测量机械振荡的幅度和相位,而无需额外的解调。