Single-crystal superalloy is characterized by no grain boundary and widely used in the aviation and aerospace industry due to its high creep strength and high thermal fatigue resistance, especially applications in aero engine necessitate numerous micro-scale structures made of single-crystal superalloy material with high-dimensional accuracy and surface quality. Micro-grinding as one of micro-precision machining technology is capable to fabricate micro-parts and structures with high machining precision and quality. In this work, a series of diamond micro-pencil grinding tool (MPGT) with diameter ranged from about 100 to 800 μm are firstly prepared by hybrid processes. The surface-generated mechanism of micro-grinding process associated with effects of length ratio of rubbing, ploughing and chip forming were explored based on analytical and experimental investigations. In addition, a novel analytical force model for the DD5 material machined by MPGT is developed considering variable size effect under different length proportion, protrusion height distribution of MPGT and material mechanical properties, which can more accurately agree well with the measured results compared with the traditional micro-grinding force model. This study enabled an in-depth understanding of mechanical behaviour characteristics, surface formation and material removal mechanism under microscopic scale of single-crystal superalloy involved in micro-grinding.

单晶高温合金具有无晶界的特征，由于其高的蠕变强度和高的抗热疲劳性而广泛用于航空和航天工业，特别是在航空发动机中的应用需要由单晶高温合金材料制成的许多微尺度结构，以及高尺寸精度和表面质量。微研磨作为微精密加工技术之一，能够以较高的加工精度和质量制造微零件和结构。在这项工作中，首先通过混合工艺制备了一系列直径约100至800μm的金刚石微铅笔研磨工具（MPGT）。微研磨过程的表面生成机理与摩擦长度比的影响有关，在分析和实验研究的基础上，研究了犁耕和切屑成型。此外，考虑到不同长度比例，MPGT突出高度分布和材料力学性能的可变尺寸效应，开发了MPGT加工的DD5材料的新型分析力模型，与传统方法相比，该模型可以更准确地与实测结果吻合微研磨力模型。这项研究使我们能够深入了解参与微研磨的单晶高温合金在微观尺度下的力学行为特征，表面形成和材料去除机理。与传统的微磨削力模型相比，MPGT的突出高度分布和材料力学性能可以更准确地与测量结果吻合。这项研究使我们能够深入了解参与微研磨的单晶高温合金在微观尺度下的力学行为特征，表面形成和材料去除机理。与传统的微磨削力模型相比，MPGT的突出高度分布和材料力学性能可以更准确地与测量结果吻合。这项研究使我们能够深入了解参与微研磨的单晶高温合金在微观尺度下的力学行为特征，表面形成和材料去除机理。