This paper presents a technique for suppressing specific resonance modes of micromechanical resonators by mechanical means. In particular, attaching multiple miniaturized beam structures with properly designed dimensions acting as anti-resonating tuned mass dampers (TMD’s) to a micromechanical clamped-clamped beam (CC-beam) resonator based on a CMOS-MEMS process platform successfully attenuate the dynamic frequency response of the fundamental mode while retaining the $2^{\mathrm {nd}}$ harmonic mode of the CC-beam. The measured results show that the frequency transmission response of the TMD-embedded CC beam drops as much as $\sim 12$ dB compared to that of a reference resonator. An analytical model is used to study the effects of the parameter variations of the TMD structures. This technique provides an alternative approach to mechanically suppressing vibration modes for the micromechanical resonators that cannot employ the conventional quarter-wavelength support technique. [2020-0289]

中文翻译：

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使用嵌入式抗谐振结构的微机械谐振器中的振动模式抑制

本文提出了一种通过机械手段抑制微机械谐振器特定谐振模式的技术。特别是，将多个具有适当设计尺寸的微型梁结构作为抗谐振调谐质量阻尼器 (TMD) 连接到基于 CMOS-MEMS 工艺平台的微机械夹钳梁 (CC 梁) 谐振器，成功地衰减了动态频率响应在保留基模的同时 $2^{\mathrm {nd}}$ CC 光束的谐波模式。实测结果表明，TMD嵌入式CC光束的频率传输响应下降幅度高达 $\sim 12$ dB 与参考谐振器的相比。分析模型用于研究 TMD 结构参数变化的影响。该技术提供了一种替代方法来机械抑制无法采用传统四分之一波长支持技术的微机械谐振器的振动模式。[2020-0289]