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Airborne Piezoelectric Micromachined Ultrasonic Transducers for Long-Range Detection
Journal of Microelectromechanical Systems ( IF 2.7 ) Pub Date : 2021-02-01 , DOI: 10.1109/jmems.2020.3037298
Guo-Lun Luo , Yuri Kusano , David A. Horsley

This paper presents an airborne piezoelectric micromachined ultrasonic transducers (PMUTs) operated at low frequency (40–50 kHz) for long-range detection, where the acoustic absorption loss in air is relatively low (0.8–1 dB/m). The PMUTs made with single-crystal Lead Zirconate Titanate (PZT) enables a high piezoelectric coefficient ( ${e} _{31, f} \approx ~16$ - 24 C/ $\text{m}^{{2}}$ ), and a low dielectric constant ( $\varepsilon _{\mathrm {r}}~\approx ~308$ ), achieving high PMUT transceiver efficiency. The $2\times 2$ PMUT array achieves a very high sound pressure level (SPL) output of 109.4 dB at 26 cm distance. Different from conventional PZT PMUTs, this study utilized single-crystal PZT with a low permittivity to achieve a good acoustic reception, demonstrating the sensitivity of 2 mV/Pa. This work reports the PMUT design, modeling, fabrication, characterization, enabling a long-range detection of 4.8 meters in a pulse-echo experiment, which was conducted by a pair of $2\times 2$ PMUT arrays with the matched resonances. [2020-0270]

中文翻译:

用于远距离探测的机载压电微加工超声换能器

本文介绍了一种在低频 (40–50 kHz) 下运行的机载压电微机械超声换能器 (PMUT),用于远程检测,其中空气中的声吸收损失相对较低 (0.8–1 dB/m)。由单晶锆钛酸铅 (PZT) 制成的 PMUT 可实现高压电系数 ( ${e} _{31, f} \approx ~16$ - 24℃/ $\text{m}^{{2}}$ ) 和低介电常数 ( $\varepsilon _{\mathrm {r}}~\approx ~308$ ),实现高 PMUT 收发器效率。这 $2\乘以 2$ PMUT 阵列在 26 厘米距离处实现了 109.4 dB 的极高声压级 (SPL) 输出。与传统的 PZT PMUT 不同,本研究利用具有低介电常数的单晶 PZT 来实现良好的声学接收,展示了 2 mV/Pa 的灵敏度。这项工作报告了 PMUT 设计、建模、制造、表征,在脉冲回波实验中实现了 4.8 米的远程检测,该实验由一对 $2\乘以 2$ 具有匹配共振的 PMUT 阵列。[2020-0270]
更新日期:2021-02-01
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