We report the results of the design, simulation, fabrication, and cold-test measurements of millimeter-band 2D planar microstrip slow-wave structures (SWSs) on dielectric substrates. Such structures have a high slow-wave factor, which allows for low-voltage operation and reduction in the size and weight of the device. A low-cost and flexible fabrication technology based on magnetron sputtering and subsequent laser ablation has been developed and is reported in the paper. Microstrip meander-line SWS circuits at V-, W-, and D-bands have been fabricated and characterized. The fabrication of ring-bar planar SWSs by the photolithographic method is also discussed. Experimental measurement of S-parameters of the fabricated structures reveals good transmission properties. Return loss (S11) does not exceed −10 dB and attenuation is about 2 dB/cm in the V-band, 10 dB/cm in the W-band, and 8.5 dB/cm in the D-band.

中文翻译：

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微型毫米波行波管的电介质基板上的微细平面慢波结构的开发

我们报告了介电基片上毫米波段2D平面微带慢波结构（SWSs）的设计，仿真，制造和冷测试测量结果。这样的结构具有高的慢波因数，这允许低压操作并减小装置的尺寸和重量。已经开发出了一种基于磁控溅射和随后的激光烧蚀的低成本，灵活的制造技术，并在论文中进行了报道。在V波段，W波段和D波段的微带曲折线SWS电路已经制作和表征。还讨论了通过光刻方法制造环形平面SWS。所制造结构的S参数的实验测量显示出良好的透射特性。