Abstract

Thermoelastic damping is a prominent internal dissipation mechanism in small-scale mechanical resonators. It has been given a lot of attention recently due to the endeavors to design high-quality nanoelectromechanical systems. In the article, this phenomenon is analyzed for in-plane vibration of orthotropic and isotropic nanoplate resonators using coupled nonlocal heat conduction and nonlocal elasticity theories. The obtained thermal-displacement equations are solved using the Galerkin residual technique and the output results are illustrated and compared for isotropic and orthotropic materials, using the classical theory, the nonlocal elasticity theory, the nonlocal heat conduction theory, and coupled nonlocal thermoelasticity. The results show significant impacts of both the nanosystem geometrical and physical parameters on the quality factor.

摘要

在小型机械谐振器中，热弹性阻尼是一种重要的内部耗散机制。由于努力设计高质量的纳米机电系统，近来它引起了很多关注。在本文中，使用耦合的非局部导热和非局部弹性理论分析了正交各向异性和各向同性纳米板谐振器的面内振动现象。使用Galerkin残差技术对获得的热位移方程进行求解，并使用经典理论，非局部弹性理论，非局部导热理论和耦合的非局部热弹性，对各向同性和正交各向异性材料的输出结果进行了说明和比较。结果表明，纳米系统的几何和物理参数均对品质因数产生重大影响。