We report the design and numerical analysis of a tellurium-oxide coated silicon-nitride waveguide on a sapphire substrate for the generation of near-infrared to mid-infrared supercontinuum light. The hybrid waveguide structure is applicable for future on-chip photonic integrated circuits. We predict a supercontinuum spectrum that extends from 0.88 to 5.22 µm or 0.95 to 5.50 µm using a pump peak power of 10 kW at 1.55 µm (50 fs pulse-width) and 2 µm (200 fs pulse-width), respectively. To the best of our knowledge, this is the first analysis of the generation of supercontinuum light from hybrid tellurium-oxide coated silicon-nitride waveguide pumped in the normal dispersion region. Waveguides such as this could significantly expand the functionality of the future photonic integrated circuits.

我们报告了蓝宝石衬底上氧化碲涂层氮化硅波导的设计和数值分析，用于产生近红外到中红外超连续谱光。混合波导结构适用于未来的片上光子集成电路。我们使用10 kW的泵浦峰值功率分别在1.55 µm（脉冲宽度50 fs）和2 µm（脉冲宽度200 fs）下预测了从0.88到5.22 µm或0.95到5.50 µm的超连续谱。据我们所知，这是对泵浦在正常色散区域中的混合氧化碲涂层氮化硅波导产生超连续光的首次分析。这样的波导可以大大扩展未来光子集成电路的功能。