Classical time-averaging interferometry technique is widely used for MEMS/MOEMS dynamic behavior investigations. It provides useful information on resonant vibration frequencies and mode shapes in the form of Bessel fringe images. To evaluate the information on objects’ vibration amplitude distribution, one needs to further process Bessel fringe images (besselograms). Among different available approaches to besselograms processing, Temporal Phase Shifting is of particular interest since it provides the most accurate results. However, it requires an additional cumbersome correction routine via specially designed look-up-tables fitted to the calculation algorithm used. In this paper, we numerically investigate the possibility of reducing Bessel images argument (phase) evaluation error by different phase shifting strategies. Two different 5 step algorithms are investigated for that purpose. Additionally, a quick and robust correction procedure based on evaluated phase distribution is presented. It allows us to speed up the calculations significantly. Moreover, such an approach is much less susceptible to noise in comparison to a look-up-table solution.

中文翻译：

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相移时间平均干涉测量中的相移策略

经典的时间平均干涉测量技术广泛用于 MEMS/MOEMS 动态行为研究。它以贝塞尔条纹图像的形式提供有关共振频率和模式形状的有用信息。为了评估物体的振幅分布信息，需要进一步处理贝塞尔条纹图像（besselograms）。在贝塞尔图处理的不同可用方法中，时间相移特别令人感兴趣，因为它提供了最准确的结果。然而，它需要通过适合所用计算算法的专门设计的查找表进行额外的繁琐校正程序。在本文中，我们数值研究了通过不同相移策略减少贝塞尔图像参数（相位）评估误差的可能性。为此目的研究了两种不同的 5 步算法。此外，还提出了一种基于评估相位分布的快速而稳健的校正程序。它使我们能够显着加快计算速度。此外，与查找表解决方案相比，这种方法对噪声的影响要小得多。