To control the polarization of 850 nm multi-mode oxide-confined vertical-cavity surface-emitting lasers (VCSELs), monolithically integrated surface gratings are investigated. VCSELs with different grating parameters are simulated by the rigorous coupled-wave analysis (RCWA) method. Optical field intensity of two polarization orientations with different grating periods and duty cycles is obtained. The mode characteristics of VCSELs with different grating parameters are achieved by FDTD method. 850 nm surface grating VCSELs are fabricated and characterized, a maximum orthogonal polarization suppression ratio (OPSR) of 20.7 dB is observed. Meanwhile, VCSEL’s output mode characteristics are improved by integrating the surface grating. Application of integrated surface grating technique to achieve dynamically polarization-stable multi-mode VCSELs which enable polarization division multiplexed data transmission, the data throughput over a given link can be doubled.

中文翻译：

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使用表面光栅的 850 nm 多模 VCSEL 的偏振控制和模式优化

为了控制 850 nm 多模氧化物限制垂直腔面发射激光器 (VCSEL) 的偏振，研究了单片集成表面光栅。具有不同光栅参数的 VCSEL 通过严格耦合波分析 (RCWA) 方法进行模拟。获得了具有不同光栅周期和占空比的两个偏振方向的光场强度。不同光栅参数的VCSEL的模式特性是通过FDTD方法实现的。制造并表征了 8​​50 nm 表面光栅 VCSEL，观察到最大正交偏振抑制比 (OPSR) 为 20.7 dB。同时，通过集成表面光栅，VCSEL 的输出模式特性得到改善。