This paper describes an opto-mechanical concept of a deformable metal mirror membrane, which can shift the focus position over a large range by use of a single actuator. The core element of the mirror is a diamond turned tulip-shaped membrane, the design is optimized to correct astigmatic aberrations which arise from the use of a curved mirror under a deflection angle. For this purpose, the target mirror surface is biconic. The manufactured mirror was tested with a maximum central deflection of 28 µm and, when used in combination with a 200 mm focal lens, is capable of producing a focus shift of up to 17.9 mm with a resulting wavefront aberration of 238.7 nm RMS_error.

中文翻译：

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用于焦距偏移的双曲面可变形金属镜的设计程序和特性

本文介绍了一种可变形金属镜膜的光机械概念，该膜可通过使用单个致动器在较大范围内移动焦点位置。反射镜的核心元件是金刚石车削的郁金香形膜，经过优化设计，可以校正由于在偏转角下使用曲面反射镜而产生的像散像差。为此，目标镜面是双锥的。所制造的反射镜经过最大中心偏转度为28 µm的测试，与200 mm聚焦透镜结合使用时，能够产生高达17.9 mm的焦点偏移，从而产生238.7 nm RMS_误差的波前像差。