Surface plasmons (SPs) are expected to have a wide range of applications in many fields, so they have recently attracted much attention. However, most of the previous studies achieved the manipulation of SPs through designing the structure of the individual meta-atom. When developing the next generation of integrated photonic devices and components, it is essential to seek out new methods of software control, which enable more diverse modulation and higher efficiency. Here, the tunable emission of SPs with metasurfaces is systematically studied. SPs are a source of on-chip plasmonic vortices (PVs). To verify the controllability of the directional excitation of SPs, we designed beam deflectors with different angles of surface waves (SWs). Furthermore, PVs with different topological charges were generated by arranging spatially varied microslits. The proposed control strategy provides a common platform for various promising applications, such as on-chip generation of the propagation control of SPs and PVs.

表面等离子体激元（SP）有望在许多领域中得到广泛应用，因此它们最近引起了很多关注。但是，大多数先前的研究都是通过设计单个元原子的结构来实现对SP的操纵。在开发下一代集成光子器件和组件时，必须寻找新的软件控制方法，这些方法可实现更多种调制方式和更高效率。在这里，系统地研究了具有超表面的SP的可调发射。SP是片上等离子体激元（PV）的来源。为了验证SP定向激励的可控性，我们设计了具有不同角度的表面波（SW）的光束偏转器。此外，通过布置空间变化的微缝产生具有不同拓扑电荷的PV。