Ceramic materials are increasingly used in micro-electro-mechanical systems (MEMS) as they offer many advantages such as high-temperature resistance, high wear resistance, low density, and favourable mechanical and chemical properties at elevated temperature. However, with the emerging of additive manufacturing, the use of ceramics for functional and structural MEMS raises new opportunities and challenges. This paper provides an extensive review of the manufacturing processes used for ceramic-based MEMS, including additive and conventional manufacturing technologies. The review covers the micro-fabrication techniques of ceramics with the focus on their operating principles, main features, and processed materials. Challenges that need to be addressed in applying additive technologies in MEMS include ceramic printing on wafers, post-processing at the micro-level, resolution, and quality control. The paper also sheds light on the new possibilities of ceramic additive micro-fabrication and their potential applications, which indicates a promising future.

陶瓷材料越来越多地用于微机电系统（MEMS）中，因为它们具有许多优点，例如耐高温，高耐磨性，低密度以及在高温下具有良好的机械和化学性能。然而，随着增材制造的兴起，将陶瓷用于功能和结构MEMS提出了新的机遇和挑战。本文对基于陶瓷的MEMS的制造工艺进行了广泛的回顾，包括增材制造和常规制造技术。综述涵盖了陶瓷的微细加工技术，重点是陶瓷的工作原理，主要特征和加工材料。在MEMS中应用附加技术时需要解决的挑战包括晶片上的陶瓷印刷，微观层面的后处理，分辨率和质量控制。本文还阐明了陶瓷添加剂微细加工的新可能性及其潜在应用，这预示了有希望的未来。