In this paper, a cross resonator pressure sensor is proposed to improve the detection accuracy of capacitor-detecting sensor. Considering electrostatic force and molecular force, the multi-field coupled dynamic equation of the sensor is established. By solving the dynamic equation, the equations for the mode function and the natural frequencies of the resonator are obtained. Using these equations, the natural frequency and mode function of the sensor are given. Changes of natural frequency of sensor with main parameters are studied. Influence of molecular force on the natural frequency is analyzed. Results show that within a considerable range of pressure, the natural frequencies increase approximately linearly with pressure. Under small pressure, small initial distance between resonator and base, and lower order modes, effects of the Van der Waals force on the natural frequencies are quite obvious.

为了提高电容器检测传感器的检测精度，提出了一种交叉谐振器压力传感器。考虑静电力和分子力，建立了传感器的多场耦合动力学方程。通过求解动力学方程，可以得到谐振器的模函数和固有频率方程。使用这些方程式，可以得出传感器的固有频率和模式函数。研究了传感器固有频率随主要参数的变化。分析了分子力对固有频率的影响。结果表明，在相当大的压力范围内，固有频率随压力近似线性增加。在较小的压力下，谐振器与基座之间的初始距离较小，并且处于低阶模式