Ultramicroscopy ( IF 2.2 ) Pub Date : 2021-01-15 , DOI: 10.1016/j.ultramic.2020.113200 Jan Neggers 1 , Eva Héripré 1 , Marc Bonnet 2 , Denis Boivin 3 , Alexandre Tanguy 4 , Simon Hallais 4 , Fabrice Gaslain 5 , Elodie Rouesne 6 , Stéphane Roux 2
Scanning Electron Microscopes (SEMs) often generate images with a shaded appearance which gives a natural 3D impression. Ergo, quite a few methods to reconstruct the 3D surface topography from these using shape-from-shading methods are available in the literature. Here, a novel approach is discussed which uses BackScatter Electron (BSE) images from multiple detectors to reconstruct the topography. Classically, algorithms exist which resort to a quad-BSE detector setup. However, other detector configurations are often found in SEMs. A set of images of these non-conforming detectors still contains enough information to allow for reconstruction, but requires a more general algorithm to do so. This article discusses a method based on a modal decomposition of the principal image components. The resulting method is shown to be efficient and independent of the number of detectors or their orientation. In fact, the orientation is identified as part of the algorithm and thus requires very little calibration.
中文翻译:
用于多探测器背散射电子拓扑重建的主图像分解
扫描电子显微镜(SEM)通常会生成具有阴影外观的图像,从而产生自然的3D印象。因此,文献中提供了许多使用“从阴影生成形状”方法从中重建3D表面形貌的方法。在这里,讨论了一种新颖的方法,该方法使用来自多个检测器的BackScatter电子(BSE)图像来重建地形。经典地,存在求助于四BSE检测器设置的算法。但是,其他检测器配置通常在SEM中找到。这些不合格检测器的一组图像仍包含足够的信息以允许进行重建,但是需要使用更通用的算法来进行重建。本文讨论了一种基于主要图像成分的模态分解的方法。结果表明,所得方法是有效的,并且与检测器的数量或其方向无关。实际上,方向被识别为算法的一部分,因此需要很少的校准。