Laser interferometry serves a fundamental role in science and technology, assisting precision metrology and dimensional length measurement. During the past decade, laser frequency combs—a coherent optical-microwave frequency ruler over a broad spectral range with traceability to time-frequency standards—have contributed pivotal roles in laser dimensional metrology with ever-growing demands in measurement precision. Here we report spectrally resolved laser dimensional metrology via a free-running soliton frequency microcomb, with nanometric-scale precision. Spectral interferometry provides information on the optical time-of-flight signature, and the large free-spectral range and high coherence of the microcomb enable tooth-resolved and high-visibility interferograms that can be directly read out with optical spectrum instrumentation. We employ a hybrid timing signal from comb-line homodyne, microcomb, and background amplified spontaneous emission spectrally resolved interferometry—all from the same spectral interferogram. Our combined soliton and homodyne architecture demonstrates a 3-nm repeatability over a 23-mm nonambiguity range achieved via homodyne interferometry and over 1000-s stability in the long-term precision metrology at the white noise limits.

中文翻译：

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通过单孤子频率微梳中的混合光谱分辨和同模干涉测量法进行的纳米精确距离计量。

激光干涉仪在科学技术中起着基础性的作用，有助于精确计量和尺寸长度测量。在过去的十年中，激光频率梳是一种宽光谱范围内的相干光学微波频率标尺，可追溯到时频标准，在激光尺寸计量学中发挥了关键作用，对测量精度的要求不断提高。在这里，我们通过自由运行的孤子频率微梳，以纳米级精度报告光谱分辨的激光尺寸计量。光谱干涉法可提供有关光学飞行时间签名的信息，并且微梳的大自由光谱范围和高相干性使牙齿分辨和高可见度干涉图可以通过光谱仪器直接读取。我们采用了来自梳齿线零差，微梳和背景放大的自发发射光谱分辨干涉仪的混合定时信号-全部来自同一光谱干涉图。我们的孤子和零差架构相结合，证明了通过零差干涉测量技术在23毫米无歧义范围内具有3纳米的可重复性，并且在白噪声极限下的长期精密计量中具有超过1000 s的稳定性。