The photocatalytic properties of titania (TiO₂) have prompted research utilising its useful ability to convert solar energy into electron–hole pairs to drive novel chemistry. The aim of the present work is to examine the properties required for a synthetic method capable of producing thin TiO₂ films, with well defined, easily modifiable characteristics. Presented here is a method of synthesis of TiO₂ nanoparticulate thin films generated using RF plasma capable of homogenous depositions with known elemental composition and modifiable properties at a far lower cost than single-crystal TiO₂. Multiple depositions regimes were examined for their effect on overall chemical composition and to minimise the unwanted contaminant, carbon, from the final film. The resulting TiO₂ films can be easily modified through heating to further induce defects and change the electronic structure, crystallinity, surface morphology and roughness of the deposited thin film.

中文翻译：

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射频溅射沉积二氧化钛薄膜的组成和性能

二氧化钛 (TiO ₂ ) 的光催化特性促使研究利用其将太阳能转化为电子-空穴对的有用能力来驱动新型化学。本工作的目的是检查能够生产具有明确定义、易于修改的特性的薄 TiO _{2薄膜的合成方法所需的性能。}这里介绍的是一种合成 TiO ₂纳米微粒薄膜的方法，该方法使用 RF 等离子体生成，能够以远低于单晶 TiO _{2的成本实现具有已知元素组成和可修改特性的均匀沉积}. 检查了多种沉积方案对整体化学成分的影响，并最大限度地减少最终薄膜中不需要的污染物碳。所得的 TiO ₂薄膜可以很容易地通过加热进行改性，以进一步诱导缺陷并改变沉积薄膜的电子结构、结晶度、表面形态和粗糙度。