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A combined actinometry approach for medium pressure N2–O2 plasmas
Plasma Sources Science and Technology ( IF 3.8 ) Pub Date : 2021-01-12 , DOI: 10.1088/1361-6595/abd0de
James E Caplinger 1 , Glen P Perram 2 , Steven F Adams 3
Affiliation  

An argon actinometry approach which uses the 777nm and 844nm atomic oxygen lines along with the common N2/${\mathrm{N}}_{2}^{+}$ line ratio method is used to experimentally investigate the excitation mechanisms of the O(3p5P) state in medium pressure (0.75 Torr) N2–O2 plasmas. The method provides strong evidence that metastable excitation from the O(3s5S) state is an important excitation mechanism for O(3p5P) state for these conditions. The strong dependence of this additional mechanism on electron density along with the use of the N2/${\mathrm{N}}_{2}^{+}$ line ratio method allow for the simultaneous determination of effective electron temperature, dissociation fraction, metastable O(3s5S) density and electron density. Predicted electron temperatures, electron densities and dissociation fractions are consistent with those found for similar discharges in prior studies. Additionally, we investigate the efficacy of using the observed 616nm atomic oxygen line from the O(4d5D) state for actinometry, which could open the door to a novel and comprehensive actinometry technique.



中文翻译:

中压N 2 -O 2等离子体的组合光化法

使用777nm和844nm原子氧谱线以及常见的N 2 /$ {\ mathrm {N}} _ {2} ^ {+} $线比法的氩气光化法,通过实验研究了在中等压力(0.75 Torr)N 2 –下O(3p 5 P)态的激发机理。O 2等离子体。该方法提供了强有力的证据表明从O(3S亚稳态激励5小号)的状态是用于O-一个重要激励机制(3P 5在这些条件P)状态。随着N 2 /的使用,这种附加机制对电子密度的强烈依赖性。$ {\ mathrm {N}} _ {2} ^ {+} $行比方法允许有效的电子温度,离解分数,亚稳态O(3S同时测定5小号)密度和电子密度。预测的电子温度,电子密度和解离分数与先前研究中类似放电所发现的一致。此外,我们研究使用从O(4d中的观察到的616nm原子氧线的功效5 d )状态射测定,这可能打开门一种新颖的,全面的射测定技术。

更新日期:2021-01-12
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