Interplay between preferential sputtering of multicomponent solids and topology of sputtered surface has been studied using a sequence of IVB tellurides PbTe, SnTe, and GeTe. The first experimental observation of the impact of near-non-preferential sputtering on the surface topology of multicomponent materials was made. In the example of SnTe, it was found that a sputtered surface resulting from its near-non-preferential sputtering is always covered with a dense array of cones of nanometer range of height. This observation opens the possibility for the simple method of formation of dense arrays of conical structures on solid surfaces by ordinary ion beam sputtering. Our experimental results show that to achieve this, a multicomponent composition, constituents of which are sputtered near-non-preferentially, has to be created.

使用一系列IVB碲化物PbTe，SnTe和GeTe，研究了多组分固体的优先溅射与溅射表面拓扑之间的相互作用。首次实验观察了近非优先溅射对多组分材料表面拓扑的影响。在SnTe的例子中，发现由其近乎非优选的溅射产生的溅射表面总是被密密麻麻排列的纳米高度范围的锥体覆盖。该观察结果为通过普通离子束溅射在固体表面上形成密集的圆锥结构阵列的简单方法提供了可能性。我们的实验结果表明，要实现这一目标，必须创建一种多组分组成，其成分几乎非优先溅射。