In this paper, a novel electromagnetic micropositioner is designed from an orthogonal 3-P(4S) parallel mechanism through the substitution method and modular design techniques. Preliminary prototype experiments show that the micropositioner possesses an excellent decoupling performance. Thus an independent control strategy is carried out for the motion control of the micropositioner. An RBF neural networks based adaptive backstepping terminal sliding mode controller is designed according to the nonlinearity characteristics of the actuator. Parameters of the system are identified with a genetic algorithm. Finally, the performances of the micropositioner and the developed control strategy are verified. Experimental results demonstrate that satisfactory performances can be achieved.

在本文中，通过替代方法和模块化设计技术，从正交3-P（4S）并联机构设计了一种新型电磁微型定位器。初步的原型实验表明，微定位器具有出色的去耦性能。因此，针对微定位器的运动控制执行了独立的控制策略。根据执行器的非线性特性，设计了一种基于RBF神经网络的自适应反推终端滑模控制器。用遗传算法识别系统的参数。最后，验证了微定位器的性能和开发的控制策略。实验结果表明，可以实现令人满意的性能。