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Crystal orientation dictated epitaxy of ultrawide-bandgap 5.4- to 8.6-eV α-(AlGa)2O3 on m-plane sapphire
Science Advances ( IF 13.6 ) Pub Date : 2021-01-08 , DOI: 10.1126/sciadv.abd5891
Riena Jinno 1 , Celesta S. Chang 2, 3 , Takeyoshi Onuma 4 , Yongjin Cho 1 , Shao-Ting Ho 5 , Derek Rowe 1 , Michael C. Cao 3 , Kevin Lee 1 , Vladimir Protasenko 1 , Darrell G. Schlom 5, 6 , David A. Muller 3, 6 , Huili G. Xing 1, 5 , Debdeep Jena 1, 5
Affiliation  

Ultrawide-bandgap semiconductors are ushering in the next generation of high-power electronics. The correct crystal orientation can make or break successful epitaxy of such semiconductors. Here, it is found that single-crystalline layers of α-(AlGa)2O3 alloys spanning bandgaps of 5.4 to 8.6 eV can be grown by molecular beam epitaxy. The key step is found to be the use of m-plane sapphire crystal. The phase transition of the epitaxial layers from the α- to the narrower bandgap β-phase is catalyzed by the c-plane of the crystal. Because the c-plane is orthogonal to the growth front of the m-plane surface of the crystal, the narrower bandgap pathways are eliminated, revealing a route to much wider bandgap materials with structural purity. The resulting energy bandgaps of the epitaxial layers span a broad range, heralding the successful epitaxial stabilization of the largest bandgap materials family to date.



中文翻译:

晶体取向决定m面蓝宝石上超宽带隙5.4- 8.6eVα-(AlGa)2O3的外延

超宽带隙半导体正在引入下一代大功率电子设备。正确的晶体取向可以成功或破坏这种半导体的外延。在此发现α-(AlGa)2 O 3的单晶层。可以通过分子束外延生长跨越5.4至8.6 eV的带隙的合金。发现关键步骤是使用m面蓝宝石晶体。外延层从α-到窄带隙β-相的相变是由晶体的c-平面催化的。由于c平面与晶体的m平面表面的生长前沿正交,因此消除了较窄的带隙通道,从而揭示了具有结构纯度的更宽的带隙材料的路径。所产生的外延层的能带隙范围很宽,预示了迄今为止最大的带隙材料家族的成功外延稳定。

更新日期:2021-01-10
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