In this paper, an optical pressure sensor based on pressure-induced birefringence in Lithium Niobate (LN) crystal is designed to achieve large sensing dynamic range. By using the photo-elastic effect of LN crystal, the optical phase change caused by the external pressure can be converted into the change of the output light intensity. Considerable sensor range can be obtained without special processing of the LN crystal, which makes it have high pressure tolerance. The sensing range of 24.85 MPa is demonstrated to be achievable on x -cut LN crystal with a length of 10 mm in the z -axis direction. The sensing sensitivity can reach 0.281 mW/MPa. By customizing the sensing range, it is expected to use the LN crystal based pressure sensor with the ease of fabrication to monitor high pressure scenarios, such as marine and large buildings monitoring.

中文翻译：

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基于LN晶体压力诱导双折射的大动态范围压力传感器

在本文中，设计了一种基于铌酸锂 (LN) 晶体压力诱导双折射的光学压力传感器，以实现大的传感动态范围。利用LN晶体的光弹效应，可以将外界压力引起的光学相变转化为输出光强的变化。LN晶体无需特殊处理即可获得相当大的传感器范围，使其具有较高的耐压性。24.85 MPa 的传感范围被证明可以在 z 轴方向长度为 10 mm 的 x 切割 LN 晶体上实现。传感灵敏度可达0.281 mW/MPa。通过定制传感范围，预计将使用易于制造的基于 LN 晶体的压力传感器来监测高压场景，例如海洋和大型建筑监测。