In this work, we demonstrate controlled area-selective deposition of aluminum oxide phosphate (AlPO) at room temperature and near atmospheric pressure using a potentially zero-waste aerosol jet fog (ajFOG) deposition system. Octyl-trichlorosilane (OTS-8) self-assembled monolayers (SAMs) are coated on SiO₂/Si substrates to form a blanket hydrophobic functionalization. Next, ultraviolet/ozone exposure through a shadow mask removes OTS-8 in the exposed regions, creating a pattern of hydrophobic and hydrophilic regions. AlPO is selectively deposited onto the hydrophilic regions from an aqueous aerosol precursor fog of aluminum phosphate inorganic clusters. Smooth films with sharp boundaries are deposited. The AlPO features and defects in the hydrophobic areas are investigated as a function of feature size, SAM type/application method/exposure time, ajFOG process parameters, and underlying substrate.

中文翻译：

---

区域选择性气溶胶喷射雾沉积：促进大面积和可持续制造

在这项工作中，我们演示了使用潜在的零废物气溶胶喷射雾化（ajFOG）沉积系统在室温和接近大气压下控制磷酸铝（AlPO）的区域选择性沉积。辛基三氯硅烷（OTS-8）自组装单层（SAM）涂覆在SiO _2上/ Si基板形成毯式疏水功能化。接下来，通过荫罩暴露于紫外线/臭氧中会去除暴露区域中的OTS-8，从而形成疏水和亲水区域的图案。AlPO从磷酸铝无机团簇的水性气溶胶前体雾选择性沉积到亲水区域。沉积具有清晰边界的光滑膜。根据特征尺寸，SAM类型/应用方法/暴露时间，ajFOG工艺参数和下面的基材，研究了疏水区域中的AlPO特征和缺陷。