Background For ultrasonic signal generation and detection, the Capacitive Micromachined Ultrasonic Transducers (CMUTs), constructed using semiconductor fabrication processes are basically Microelectromechanical Systems based structures. Utilizing the semiconductor technology, the CMUTs can provide improved bandwidth, high transduction efficiency, ease of batch production etc. in contrast to piezoelectric transducers. Objective The CMUTs can be constructed in various possible geometries like square, rectangular, circular, and hexagonal. It has been found that CMUT with circular geometry provides optimum performance but has the disadvantage of area wastage in array construction due to voids in between the devices. Hence, the hexagonal CMUT is modelled and analyzed with circular CMUT. Method The Kirchhoff’s thin plate theory is employed for novel analytical model of hexagonal CMUT. Result The results comparison is found similar with the circular CMUT with 13.42% of more wafer area utilization. Conclusion The proposed analytical model provides a cheaper design tool for the researchers with highly reduced simulation time.

背景技术对于超声信号的产生和检测，使用半导体制造工艺构造的电容式微机械超声换能器（CMUT）基本上是基于微机电系统的结构。与压电换能器相比，利用半导体技术，CMUT可以提供更高的带宽，更高的转换效率，易于批量生产等。目的CMUT可以构建为各种可能的几何形状，例如正方形，矩形，圆形和六边形。已经发现具有圆形几何形状的CMUT提供最佳性能，但是由于器件之间的空隙而具有浪费阵列结构的缺点。因此，六角形CMUT可以通过圆形CMUT建模和分析。方法采用Kirchhoff薄板理论建立六角形CMUT的新型分析模型。结果结果比较发现与圆形CMUT相似，更多的晶片面积利用率为13.42％。结论所提出的分析模型为研究人员提供了一种更便宜的设计工具，并且大大减少了仿真时间。