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3D nonlinear photolithography of Tin oxide ceramics via femtosecond laser
Science China Materials ( IF 8.1 ) Pub Date : 2021-01-04 , DOI: 10.1007/s40843-020-1543-x
Nianyao Chai , Yanan Liu , Yunfan Yue , Ping Wei , Xuewen Wang , Junjie Zhao , Qi Zhang , Fuzhi Huang , Zhongle Zeng , Zongsong Gan , Liqiang Mai , Yibing Cheng

As a wide band gap semiconductor material, tin oxide (SnO2) has been widely used in gas sensing, optoelectronics and catalysis. The complex micro and nanoscale three-dimensional (3D) geometric structures endow the conventional SnO2 ceramics with novel properties and functionalities. Nevertheless, ceramics cannot be cast or machined easily due to their high mechanical toughness and resistance. The additive manufacturing opens a great opportunity for flexibly geometrical shaping, while the arbitrary shaping of SnO2 ceramics at micro and nanoscale is always a challenge. Herein, preceramic monomers which can be polymerized under ultrafast laser irradiation, were utilized to form complex and arbitrary 3D preceramic polymer structures. After calcination treatment, these green-body structures could be converted into pure high-dense SnO2 ceramics with uniform shrinkage, and the feature size was down to submicron. Transmission electron microscopy (TEM) analysis displays that the printed SnO2 ceramic nanostructures can be nanocrystallized with grain sizes of 2.5 ± 0.4 nm. This work provides the possibility of manufacturing 3D SnO2 ceramic nanostructures arbitrarily with sub-100 nm resolution, thus making it promising for the applications of SnO2 in different fields.



中文翻译:

飞秒激光对氧化锡陶瓷进行3D非线性光刻

作为宽带隙半导体材料,氧化锡(SnO 2)已广泛用于气体传感,光电和催化。复杂的微米和纳米级三维(3D)几何结构赋予常规SnO 2陶瓷以新颖的特性和功能。然而,由于其高的机械韧性和抵抗力,陶瓷不易铸造或机加工。增材制造为灵活的几何成型提供了巨大的机会,而SnO 2的任意成型微米和纳米尺度的陶瓷一直是一个挑战。在本文中,可以在超快激光辐照下聚合的陶瓷前体单体被用于形成复杂且任意的3D陶瓷前体聚合物结构。经过煅烧处理后,这些生坯结构可以转变为具有均匀收缩率的纯高密度SnO 2陶瓷,并且特征尺寸减小到亚微米。透射电子显微镜(TEM)分析显示,印刷的SnO 2陶瓷纳米结构可以纳米晶化,晶粒尺寸为2.5±0.4 nm。这项工作提供了以低于100 nm的分辨率任意制造3D SnO 2陶瓷纳米结构的可能性,因此使其对于SnO 2的应用前景广阔。 在不同的领域。

更新日期:2021-01-05
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