Large energy consumption of air conditioning system occurs in semiconductor cleanrooms due to high demand for the control of temperature and humidity ratio. This study focuses on the operating performance and energy saving potential of the air handling process. On-site measurements of the air conditioning system were conducted in different seasons. The results reveal that cold-heat offset problem occurs in the current air conditioning system in summer, including 41.7% cold-heat offset between the heating in the make-up air unit (MAU) and cooling in the dry cooling coil (DCC), and 16.4% cold-heat offset in MAU. Feasibility of removing reheating in summer is simply verified. In winter, DCC has the potential to recover indoor heat for preheating the outdoor air. Therefore, high temperature chillers (Method A), canceling reheating (Method B) and heat recovery design from DCC system to MAU (Method C) are the energy saving methods adopting in this study. In order to analyze the annual energy saving potential of the proposed system, a dynamic calculation model is established. Cooling in DCC (Q_c,DCC) is 42.8%–54.1% less than the current system annual. Heating in MAU (Q_h,MAU) is 52.8%–94.3% less than the current system in transition season and winter (N ov.–Apr.), and is no required in summer (May–Oct.) in the proposed system. The proposed system can save 621 kWh/m² annual, which is 20.2% less than the current system. It is indicated that both removing reheating and adopting heat recovery system in the current cleanrooms have certain energy saving significance.

由于对温度和湿度比的控制要求很高，因此半导体洁净室中空调系统的能耗很大。这项研究的重点是空气处理过程的运行性能和节能潜力。在不同的季节对空调系统进行现场测量。结果表明，在夏季，当前的空调系统中存在冷热偏移问题，其中包括补充空气单元（MAU）的加热与干冷盘管（DCC）的冷却之间的41.7％的冷热偏移， MAU中有16.4％的冷热补偿。夏季消除再热的可行性得到了简单验证。在冬天，DCC有潜力回收室内热量以预热室外空气。因此，高温冷水机（方法A），取消再加热（方法B）和从DCC系统到MAU的热量回收设计（方法C）是本研究采用的节能方法。为了分析该系统每年的节能潜力，建立了动态​​计算模型。DCC冷却（Q _c，DCC）比当前系统年度减少42.8％–54.1％。在拟议系统中，MAU（Q _h，MAU）的供暖比过渡季节和冬季（Nov.–Apr。）的当前系统少52.8％–94.3％，并且在夏季（5月至10月）不需要。 。拟议的系统每年可节省621 kWh / m ²，比当前系统节省20.2％。结果表明，当前无尘室消除再热和采用余热回收系统具有一定的节能意义。