Nano-Micro Letters ( IF 26.6 ) Pub Date : 2021-01-04 , DOI: 10.1007/s40820-020-00573-4 Bowen Zhang 1 , Chao Yun 1 , Judith L MacManus-Driscoll 1
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A new way to achieve high yield and large area oxide thin film transfer is developed. Three different film compositions are demonstrated: SrRuO3, CeO2, and CeO2/STO nanocomposite films.
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Cracks, wrinkles, and damages are prevented by the new transfer method. They are commonly introduced by conventional transfer processes.
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Vertically aligned nanocomposite (VAN) structures can further improve the transfer yield. Possible mechanisms related to increased fracture toughness are proposed.
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We have opened up a route to large-scale oxide thin-film-based electronic device applications.
中文翻译:
清洁大面积外延氧化物薄膜的高产转移
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开发了一种实现高产大面积氧化物薄膜转移的新途径。展示了三种不同的薄膜组成:SrRuO 3、CeO 2和CeO 2 /STO 纳米复合薄膜。
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新的转移方法可以防止裂缝、褶皱和损坏。它们通常由传统的转移过程引入。
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垂直排列的纳米复合材料(VAN)结构可以进一步提高转移产量。提出了与增加断裂韧性有关的可能机制。
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我们开辟了一条通往大规模氧化物薄膜基电子器件应用的途径。