Abstract

For optical monitoring of layer thickness in the deposition of multilayer optical coatings, a stable method is proposed that completely eliminates the cumulative effect of errors in the thicknesses of deposited layers. The considered monitoring method relies on a nonlocal algorithm for analyzing data measured in the course of coating deposition monitoring. Computer simulation of coating deposition is used to demonstrate the effectiveness of the proposed type of monitoring as compared with other optical monitoring methods.

中文翻译：

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光学监控多层光学镀层沉积的稳定方法

摘要

为了对多层光学涂层的沉积中的层厚度进行光学监控，提出了一种稳定的方法，该方法完全消除了沉积层厚度误差的累积影响。所考虑的监视方法依赖于非局部算法来分析在涂层沉积监视过程中测得的数据。与其他光学监测方法相比，计算机模拟了涂层沉积来证明所建议的监测类型的有效性。