We propose a sensor-probe system for evaluating local airway resistance in the lungs. The system consists of a micro-machined thermal-flow sensor, based on the hot-wire airflow-meter principle, fabricated on a flexible substrate consisting of Cu foil and polyimide film and a commercially available Si pressure sensor. We inserted the system into a tube with a 5.0-mm inner diameter to evaluate its detection properties under a steady-flow of up to 6.0 L/m. The flow velocity vs. sensor output and pressure vs. tube length were successfully obtained. We then applied the system for reciprocating airflow measurement. A flow of 30 cc at 0.5 Hz generated with an artificial ventilator was used to imitate the breathing of a small animal, and we confirmed that the system successfully detected both flow and pressure change generated in the tube.

我们提出了一种传感器探针系统，用于评估肺部局部气道阻力。该系统包括一个基于热线气流计原理的微机械热流量传感器，该传感器制造在由铜箔和聚酰亚胺薄膜组成的柔性基板上，以及市售的硅压力传感器。我们将系统插入内径为5.0 mm的管中，以评估在高达6.0 L / m的稳定流量下的检测性能。成功获得了流速与传感器输出的关系以及压力与管的长度的关系。然后，我们将该系统应用于往复式气流测量。用人工呼吸机在0.5 Hz下产生的30 cc流量模拟了小动物的呼吸，并且我们确认该系统成功地检测到管中产生的流量和压力变化。