Non-contact, cost-efficient, and long-range precision metrology is essential for applications in diverse areas, from 3D sensing and robotics to automated manufacturing, and multiwavelength interferometry is a compelling candidate. Here, we present a new arithmetic approach for multiwavelength phase unwrapping, with the maximum theoretical range and tolerance to measurement noise in phase. We supplement our formulation with a simultaneous phase shifting interferometry setup with a low measured standard deviation of phase, $\sigma _\phi ={2\pi }/{1325}$ . We unwrap the interferometric phases of experiments performed through wavelengths with a greatest common divisor of 25 nm, demonstrate a range equal to their lowest-common-multiple with the precision of a single wavelength interferometer, and reconstruct three-dimensional scenes based on a single-pixel 3D imaging system.

中文翻译：

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波长分光激光干涉术

对于从3D传感和机器人技术到自动化制造的各种领域的应用，非接触式，经济高效的远程精确计量是必不可少的，而多波长干涉测量法则是极具吸引力的选择。在这里，我们提出了一种用于多波长相位展开的新算法，具有最大的理论范围和对相位测量噪声的容忍度。我们通过同时相移干涉测量仪设置来补充我们的配方，并具有较低的相位测量标准偏差，$ \ sigma _ \ phi = {2 \ pi} / {1325} $ 。我们解开了通过最大公约数为25 nm的波长进行的实验的干涉测量阶段，展示了一个等于其最小公倍数的范围，并具有单波长干涉仪的精度，并基于一个单波长干涉仪重建了三维场景像素3D成像系统。