This study proposes a method to drive a solid by liquid–solid coupling and designs and manufactures a surface acoustic wave actuator to drive a wetted solid ball. The solid ball moves under surface acoustic wave microfluidic acoustic streaming. By theoretical analysis and experimental testing, the driving model is systematically examined in terms of the influence of the device frequency, input power, droplet viscosity, and other parameters on the movement of the ball. The speed at the mark end of the ball under 4.17 W of input power and driving at 60-MHz frequency in pure water reaches 0.175 m/s. Compared with the driving method of a surface acoustic wave linear motor, this wetted solid-driven method easily ensures that the solid ball drives to reach the same order of speed, avoiding numerous problems present in the existing surface acoustic wave linear motors. The proposed method provides important guidance and is of practical significance for the application of surface acoustic wave technology in micromotors and micromanipulation.

中文翻译：

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基于声表面波微流控的固体驱动机理与实验研究

这项研究提出了一种通过液-固耦合来驱动固体的方法，并设计和制造了一个表面声波致动器来驱动一个湿的固体球。固体球在表面声波微流体声流作用下移动。通过理论分析和实验测试，根据设备频率，输入功率，液滴粘度和其他参数对球的运动的影响，系统地检查了驱动模型。在纯净水中，在输入功率4.17 W下，以60 MHz的频率驱动时，球的记号端的速度达到0.175 m / s。与表面声波线性电动机的驱动方法相比，这种湿式固体驱动方法可轻松确保固体球驱动达到相同的速度等级，避免了现有的表面声波线性电动机中存在的许多问题。该方法为声表面波技术在微电机和微操纵中的应用提供了重要的指导和实际意义。