In this paper, an optical pressure‐sensitive membrane based on plasmon resonance absorption has been designed, fabricated, and demonstrated. The membrane utilizes plasmon resonance on a gold island film embedded in a polydimethylsiloxane (PDMS) layers, and the shift of the resonant wavelength was used as an indicator of pressure‐induced strain of the membrane. The membrane with total thickness of 100 µm was prepared with spin‐coating of PDMS and vacuum evaporation of gold island film with the nominal thickness of 10 nm. Pressure sensitivity of the fabricated membrane was demonstrated from the measurement of absorbance spectra and the maximum sensitivity of 0.35 nm/kPa was achieved by applying pressure up to 35 kPa. Plasmon resonance mode attributing to the pressure sensitivity has been analyzed through comparison between electromagnetic simulation and membrane stretching test. From the stretching test, red shifts of the resonant wavelength were obtained for both parallel and perpendicular polarizations to the tensile direction with the sensitivities of 0.372 and 0.134 nm/%, respectively. From the electromagnetic simulation, these red shifts can be attributed to both gap‐mode and deformation‐mode resonances of the gold island film.

中文翻译：

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基于等离振子共振的金岛薄膜光学压敏膜的研制

在本文中，已经设计，制造和演示了基于等离振子共振吸收的光学压敏膜。该膜利用在嵌入二甲基硅氧烷（PDMS）层中的金岛膜上的等离振子共振，共振波长的变化被用作指示压力引起的膜应变的指标。通过旋涂PDMS并真空蒸发标称厚度为10 nm的金岛膜来制备总厚度为100 µm的膜。通过吸收光谱的测量证明了所制造的膜的压力敏感性，并且通过施加高达35kPa的压力达到了0.35nm / kPa的最大敏感性。通过比较电磁模拟和膜拉伸试验，分析了归因于压力敏感性的等离子共振模式。从拉伸试验中，对于平行和垂直偏振，在拉伸方向上均获得了共振波长的红移，其灵敏度分别为0.372和0.134 nm /％。从电磁模拟中，这些红移可归因于金岛膜的间隙模共振和变形模共振。