A poly(methyl methacrylate) (PMMA) bilayer antireflective coating (ARC) is designed based on polymeric microphase separation and matrix-assisted pulsed laser evaporation (MAPLE). The spin-coated layer shows subwavelength porous network structures, after phase separation via annealing and removal of the polystyrene (PS) phase, while the MAPLE deposited surface layer exhibits a biomimic moth-eye structure on glass to trap the incident light. The elaborate spin coated structure can be controlled flexibly by changing the ratio of mixture, annealing time and temperature, and the moth-eye structure can also be tuned by deposition parameters. The transmittance of the ARC presents a maximum of 95.64% and an average of 94.81% in visible range. The moth-eye structure on glass substrate formed by nanoglobules makes positive contributions to the improvement of transmittance according to UV–Vis result and simulation. The wetting motion of PMMA globules is observed as well by the comparison of AFM surface morphologies and cross-sectional profiles of globules on glass and polymer thin film. This work is a novel attempt to fabricate bilayer ARC with two different structures by a single polymeric material and will provide new route for fabrication of multilayer ARCs.

中文翻译：

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通过微相分离和MAPLE制成的双层PMMA减反射涂层

基于聚合物微相分离和基质辅助脉冲激光蒸发（MAPLE）设计了一种聚甲基丙烯酸甲酯（PMMA）双层抗反射涂层（ARC）。在通过退火和聚苯乙烯（PS）相分离后的相分离之后，旋涂层显示出亚波长多孔网络结构，而MAPLE沉积的表面层在玻璃上表现出仿生的蛾眼结构以捕获入射光。通过改变混合比例，退火时间和温度，可以灵活地控制精细的旋涂结构，并且还可以通过沉积参数来调整蛾眼结构。在可见光范围内，ARC的透射率最大值为95.64％，平均值为94.81％。根据紫外-可见光结果和模拟，由纳米球形成的玻璃基板上的蛾眼结构为透射率的提高做出了积极贡献。通过比较AFM表面形态和玻璃和聚合物薄膜上的小球的横截面轮廓，还可以观察到PMMA小球的润湿运动。这项工作是通过单一聚合材料制造具有两种不同结构的双层ARC的新颖尝试，它将为制造多层ARC提供新的途径。