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Atomic Layer Deposition of the Lithium–Silicon–Tin Oxide System for Solid-State Thin-Film Lithium Batteries
Russian Metallurgy (Metally) Pub Date : 2020-12-30 , DOI: 10.1134/s003602952013025x I. V. Mitrofanov , D. S. Nazarov , A. A. Popovich , M. Yu. Maximov
中文翻译:
固态薄膜锂电池锂-硅-锡氧化物体系的原子层沉积
更新日期:2020-12-30
Russian Metallurgy (Metally) Pub Date : 2020-12-30 , DOI: 10.1134/s003602952013025x I. V. Mitrofanov , D. S. Nazarov , A. A. Popovich , M. Yu. Maximov
Abstract
Materials and methods for creating the elements of thin-film lithium-ion batteries (TFLBs) are considered.
中文翻译:
固态薄膜锂电池锂-硅-锡氧化物体系的原子层沉积
摘要
考虑了用于制造薄膜锂离子电池(TFLB)的材料和方法。