Ta–Zr–Si–B–C–N coatings are obtained by magnetron sputtering in argon, nitrogen, and ethylene atmosphere. The structure of the coatings is analyzed by scanning electron microscopy and energy dispersive and X-ray phase analysis. The mechanical properties of the coatings are determined by nanoindentation. Tribological tests are performed using a Tribometer automated testing machine under a load of 1 N. Wear tracks are analyzed using an optical profile meter. The heat resistance of the coatings is studied at 1000°C. It is established that the coatings obtained in argon are characterized by the highest hardness (30 GPa) and elastic recovery (79%). Moreover, they can be resistant against oxidation up to 1000°C inclusively, which is attributed to the protective film formed on their surface comprised of silicon and tantalum oxides. Reactive coatings obtained in nitrogen are characterized by lower heat resistance in comparison with nonreactive coatings, being completely oxidized by 1000°C. However, they have a low coefficient of friction: less than 0.15.

Ta-Zr-Si-BC-N涂层是通过磁控溅射在氩气，氮气和乙烯气氛中获得的。通过扫描电子显微镜，能量色散和X射线相分析来分析涂层的结构。涂层的机械性能由纳米压痕确定。使用Tribometer自动测试仪在1 N的负载下进行摩擦学测试。使用光学轮廓仪对磨损轨迹进行分析。在1000℃下研究了涂层的耐热性。可以确定的是，在氩气中获得的涂层具有最高的硬度（30 GPa）和弹性回复率（79％）。而且，它们可以抵抗高达1000℃（包括端值）的氧化，这归因于在由硅和钽氧化物组成的表面上形成的保护膜。与非反应性涂层相比，在氮气中获得的反应性涂层的特点是耐热性较低，在1000°C时会被完全氧化。但是，它们的摩擦系数很低：小于0.15。