An optical waveguide is an important dielectric device that guides the propagation of light waves. Ion implantation is a competitive waveguide preparation technique with advantages including reliance, simpleness and flexibility. In this work, a 400-keV helium ion implantation with a fluence of 6.0 × 1016 ions/cm² was carried out to manufacture a planar waveguide on the surface of the fused silica glass. The formation mechanism of the waveguide was analyzed by the nuclear energy deposition based on the SRIM 2013 and the refractive index distribution with the help of the reflectivity calculation method (RCM). The geometry structure and the guiding performance of the waveguide were studied by the metallographic microscope and the end-face coupling system, respectively. The investigation on the fabrication and characteristics of fused silica glass optical waveguides is of great significance for the development of passive devices in the field of optical communications.

中文翻译：

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He+注入熔融石英玻璃波导的光学特性

光波导是引导光波传播的重要介质器件。离子注入是一种具有竞争力的波导制备技术，具有可靠、简单、灵活等优点。在这项工作中，一个 400 keV 的氦离子注入，其通量为6.0 × 1016 进行离子/cm ²以在熔融石英玻璃的表面上制造平面波导。通过基于SRIM 2013的核能沉积和反射率计算方法（RCM）的折射率分布，分析了波导的形成机制。分别用金相显微镜和端面耦合系统研究了波导的几何结构和导向性能。研究熔融石英玻璃光波导的制备和特性对于光通信领域无源器件的发展具有重要意义。