Microdosimetry provides measurements of stochastic lineal energy deposition in a micrometric sensitive volume (SV) that are comparable to human cell dimensions, typically in the order of 10–15 $\mu \text{m}$ in diameter. Silicon-based microdosimeters have been fabricated using “3-D technology,” providing true cell-like SVs that are fully encapsulated by a 3-D through substrate electrode. The unique geometry has been made feasible using modern microelectromechanical systems (MEMS). The combination of MEMS techniques and radiation detector fabrication brings forth challenges in achieving reliability, consistency, and high yield. This article reviews the technological challenges encountered in several prototype runs completed at SINTEF. The technological review and prototype iterations aim to deliver a future technology plan at the manufacture level with a high yield throughput.

中文翻译：

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硅基全 3D 微剂量计的制造和首次表征

微量测定提供了与人类细胞尺寸相当的微米敏感体积 (SV) 中随机线性能量沉积的测量值，通常直径约为 10-15 $\mu\text{m}$。硅基微剂量计是使用“3-D 技术”制造的，提供真正的细胞样 SV，完全由 3-D 穿透基板电极封装。使用现代微机电系统 (MEMS) 使独特的几何形状变得可行。MEMS 技术和辐射探测器制造的结合给实现可靠性、一致性和高产量带来了挑战。本文回顾了在 SINTEF 完成的几个原型运行中遇到的技术挑战。