ABSTRACT

With the rapid development of industrial production and aerospace, how to measure the plasma density has also developed rapidly. So a radio-frequency plasma transducer based on a three-layer dielectric substrate antenna with a high dielectric constant is introduced. The top and bottom layers are dielectric plates, which protect the internal antenna structure and improve the equivalent permittivity of the antenna. The middle layer is the structure layer of the designed antenna. And the antenna size is 3.8 × 2 × 1.8 mm³. When the plasma frequency changes from 0.3 GHz to 7 GHz, the corresponding dielectric substrate antenna resonant frequency (RF) changes from 4.076 to 5.213 GHz. The minimum unit is 0.1 GHz, and all the measurement accuracy is more than 90%. The method based on the effective dielectric constant of plasma will change under different plasma frequencies, so the RF of the antenna is different. In this paper, the radio-frequency plasma transducer is studied theoretically and analyzed numerically.

摘要

随着工业生产和航空航天的飞速发展，如何测量等离子体密度也迅速发展。因此，介绍了一种基于具有高介电常数的三层介电基片天线的射频等离子体换能器。顶层和底层是介电板，可以保护内部天线结构并提高天线的等效介电常数。中间层是设计天线的结构层。天线尺寸为3.8×2×1.8 mm ³。当等离子体频率从0.3 GHz变为7 GHz时，相应的介电基板天线谐振频率（RF）从4.076 GHz变为5.213 GHz。最小单位为0.1 GHz，所有测量精度均超过90％。基于等离子有效介电常数的方法会在不同等离子频率下发生变化，因此天线的射频会有所不同。本文对射频等离子体换能器进行了理论研究和数值分析。